Fluoromethane

Fluoromethane, also known as methyl fluoride, Freon 41, Halocarbon-41 and HFC-41, is a non-toxic, liquefiable, and flammable gas at standard temperature and pressure. It is made of carbon, hydrogen, and fluorine. The name stems from the fact that it is methane (CH4) with a fluorine atom substituted for one of the hydrogen atoms. It is used in semiconductor manufacturing processes as an etching gas in plasma etch reactors.

Fluoromethane
Names
IUPAC name
Fluoromethane
Other names
Freon 41

Methyl fluoride
Halocarbon 41

Monofluoromethane
Identifiers
3D model (JSmol)
Abbreviations R41
1730725
ChEBI
ChEMBL
ChemSpider
ECHA InfoCard 100.008.907
EC Number
  • 209-796-6
391
KEGG
MeSH Fluoromethane
PubChem CID
UNII
UN number UN 2454
  • InChI=1S/CH3F/c1-2/h1H3 Y
    Key: NBVXSUQYWXRMNV-UHFFFAOYSA-N Y
  • InChI=1/CH3F/c1-2/h1H3
    Key: NBVXSUQYWXRMNV-UHFFFAOYAF
SMILES
  • FC
Properties
CH3F
Molar mass 34.03 g/mol
Appearance Colourless gas
Odor pleasant, ether-like odour at high concentrations
Density 1.4397 g/L

0.557 g/cm3 (liquid) at saturation pressure at 25 °C

Melting point −137.8 °C (−216.0 °F; 135.3 K)
Boiling point −78.4 °C (−109.1 °F; 194.8 K)
1.66 L/kg (2.295 g/L)
Vapor pressure 3.3 MPa
Hazards
GHS labelling:
Danger
H220, H280
P210, P377, P381, P403, P410+P403
NFPA 704 (fire diamond)
1
4
0
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
N verify (what is YN ?)
Infobox references
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